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Nanotechnology is the manipulation of matter on an atomic and molecular scale. They usually took the form of microscopic robots. Many species had developed nanotechnology.
The Daleks created the Contagium, which could infect biological hosts with nanites, allowing the Daleks to control their minds. (COMIC: Fire and Brimstone) They later created nanoclouds which converted humans into Dalek puppets. (TV: Asylum of the Daleks)